The most important features of WAFERMAP for Windows are listed below:
- Input of up to 32768 values and according site coordinates
- Import functions for data from metrology tools
- such as Filmetrics or Eichhorn and Hausmann E+H,
- which directly write the WAFERMAP format (e.g. ISIS Optronics), and
-which write pure ASCII data
- Export of pictures in different formats
- Export of the analysis of complete data sets into HTML format
- Configurable 1D- (line scan), 2D- (Contour and colored), 3D (solid or wire frame), 3D bar chart, and 2D value plots
- Statistical analysis (Histogram, calculation of mean, Standard Deviation, etc.)
- Sigma range maps
- File compare operations (add, subtract, multiply, divide, or average) of two different maps
- Global operations (add, subtract, divide, square, square root, etc.)
- 1st and 2nd derivative of a map
- Shift (X and Y direction) and rotation of grids
- Mirroring of maps
- Automatic generation of circular patterns (9, 25, 49, 81, 121, 169, 225, up to 1521 sites)
- Automatic generation of Cartesian patterns based on X and Y resolution
- Definition of any site pattern using a graphic editor
- Cut and Paste functionality for coordinates and measurement values e.g. from Excel
- Statistical Process Control tools including:
- Trend charts sortable by any criterion (date & time, mean, max, min, std. dev., etc.)
- X-Y-Plots of trend parameters
- Trend Lists sortable by any criterion (date & time, mean, max, min, std. dev., etc.)
- Browser
- Global Statistics ("All points, all measurements")
- Inter-application communication via DCOM (ActiveX server)
- Multiple files can be loaded and open simultaneously
- Multiple views of a single file can be selected and displayed simultaneously
- Multiple views can be printed in b/w or color on a single sheet, printouts are configurable
- Extensive on-line help and HTML based user manual.
Click here to visit Boin GmbH and to download demo software versions